OPTICAL INSPECTION APPARATUS, OPTICAL INSPECTION SYSTEM, OPTICAL INSPECTION METHOD, AND OPTICAL INSPECTION PROGRAM

According to one example, an optical inspection apparatus includes: an illumination portion, a wavelength selection portion and an imaging portion. The illumination portion irradiates a first object point of a surface of an object with first illumination light, and a second object point of the surfa...

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Bibliographische Detailangaben
Hauptverfasser:	Okano, Hideaki, Ohno, Hiroshi, Kano, Hiroya
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	According to one example, an optical inspection apparatus includes: an illumination portion, a wavelength selection portion and an imaging portion. The illumination portion irradiates a first object point of a surface of an object with first illumination light, and a second object point of the surface of the object with second illumination light. The imaging portion images light from the first object point through the wavelength selection portion when a normal direction at the first object point and a direction of the first illumination light have an opposing relationship, and images light from the second object point through the wavelength selection portion when a normal direction at the second object point and a direction of the second illumination light have an opposing relationship.