MICROMECHANICAL COMB STRUCTURE MADE OF GLASS, AND ASSOCIATED METHOD AND USE

In order to extend the possible applications of the previously known LIDE (laser induced deep etching) process, according to the invention a micromechanical comb structure (25) is produced by applying a plurality of laser pulses (4) to a glass substrate (3) with a subsequent wet-chemical etching ste...

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Bibliographische Detailangaben
Hauptverfasser:	SZIEDAT, Julia, OSTHOLT, Roman, BERTKE, Maik, AMBROSIUS, Norbert, LOOTZE, Michael, SCHUDAK, Svenja
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS PUBLIC ADDRESS SYSTEMS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	In order to extend the possible applications of the previously known LIDE (laser induced deep etching) process, according to the invention a micromechanical comb structure (25) is produced by applying a plurality of laser pulses (4) to a glass substrate (3) with a subsequent wet-chemical etching step in order to expose the comb structure (25), and the position of those laser pulses (4) which define the outer contour (6) of fingers (24) of the comb structure (25) are precisely controlled. This makes it possible to form very narrow fingers (24) that have uniform side walls (13), allowing very small gaps (35) and uniform electrostatic activation of the comb structure (25). By controlling the phase position φ and/or the extent of the sidewall scalloping of the fingers (24), it is also possible to favourably influence or adjust, in a targeted manner, the mechanical properties of the comb structure (25).