PELLICLE FRAME LAMINATE AND METHOD FOR MANUFACTURING PELLICLE USING SAID LAMINATE

Provided are: a pellicle frame laminate 10 characterized by having a first adhesive layer 11 on an upper end surface 1a of a pellicle frame 1 having the upper end surface and a lower end surface and covering the first adhesive layer with a first protection sheet 21 and by having a second adhesive la...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	YANASE, Yu, SHIRASAKI, Toru
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	Provided are: a pellicle frame laminate 10 characterized by having a first adhesive layer 11 on an upper end surface 1a of a pellicle frame 1 having the upper end surface and a lower end surface and covering the first adhesive layer with a first protection sheet 21 and by having a second adhesive layer 12 on a lower end surface 1b and covering the second adhesive layer with a second protection sheet 22; and a method for manufacturing a pellicle by removing the first protection sheet 21 of the pellicle frame laminate 10 and providing, to the exposed first adhesive layer 11, a pellicle film which has been prepared separately. According to the present invention, by using a pellicle frame in which the adhesive layers are formed on both the upper end surface and lower end surface of the pellicle frame and both surfaces are protected with the protection sheets, it is possible to assemble a pellicle at a place where an adhesive for the pellicle film cannot be applied.