SEMICONDUCTOR STRUCTURE AND PREPARATION METHOD THEREFOR, AND MEMORY AND PREPARATION METHOD THEREFOR

SEMICONDUCTOR STRUCTURE AND PREPARATION METHOD THEREFOR, AND MEMORY AND PREPARATION METHOD THEREFOR

An embodiment of the application provides a semiconductor structure. The semiconductor structure includes: a substrate; a plurality of capacitors arranged in the substrate; and a plurality of active pillars arranged above the substrate. Each of the plurality of active pillars is arranged above a res...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LEE, Tzung-Han, LIU, Chih-Cheng, CAO, Kanyu, YANG, Huaiwei
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:An embodiment of the application provides a semiconductor structure. The semiconductor structure includes: a substrate; a plurality of capacitors arranged in the substrate; and a plurality of active pillars arranged above the substrate. Each of the plurality of active pillars is arranged above a respective one of the plurality of capacitors, and a bottom portion of each of the plurality of active pillars is electrically connected to a top portion of the respective one of the plurality of capacitors therebelow.