SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

A semiconductor device (10, 100) includes a semiconductor substrate (12) having a quadrangular shape when viewed from above and having a front surface (12a), a rear surface (12b) opposite to the front surface, and four side surfaces (12c) connecting the front surface and the rear surface. Each of th...

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Bibliographische Detailangaben
Hauptverfasser: OKUDA, Masaru, NAGAYA, Masatake, MORI, Akira, NAGUMO, Yuji, KITAICHI, Mitsuru, KIYAMA, Naoya, TAKEDA, Masakazu, UECHA, Masashi
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A semiconductor device (10, 100) includes a semiconductor substrate (12) having a quadrangular shape when viewed from above and having a front surface (12a), a rear surface (12b) opposite to the front surface, and four side surfaces (12c) connecting the front surface and the rear surface. Each of the side surfaces has a step section (30) in which a plurality of protruding portions (30a) and a plurality of recessed portions (30b) alternately and repeatedly appear along a direction in which a peripheral edge of the front surface of the semiconductor substrate extends.