METHOD OF ASSESSING A SAMPLE, APPARATUS FOR ASSESSING A SAMPLE

METHOD OF ASSESSING A SAMPLE, APPARATUS FOR ASSESSING A SAMPLE

The present disclosure relates to apparatus and methods for assessing samples (208) using charged particles. In one arrangement, a degassing action is performed by exposing a target area of a sample (208) with charged particles to stimulate degassing. A rate of degassing from the target area is meas...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: WIELAND, Marco, Jan-Jaco
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:The present disclosure relates to apparatus and methods for assessing samples (208) using charged particles. In one arrangement, a degassing action is performed by exposing a target area of a sample (208) with charged particles to stimulate degassing. A rate of degassing from the target area is measured during the degassing action. Initiation of an assessing of the sample (208) is controlled based on a characteristic of the measured rate of degassing. The assessing of the sample (208) comprises exposing the target area with charged particles and detecting signal charged particles from the target area.