PRESSURE SENSOR AND SENSOR SYSTEM

[Problem] To provide a pressure sensor and a sensor system which are able to easily detect the state of power supplied to a detection circuit. [Solution] A pressure sensor 10 comprises: a membrane 22 in which deformation in response to pressure occurs; a plurality of sensor resistors R1-R4 which are...

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Bibliographische Detailangaben
Hauptverfasser:	NAWAOKA, Kohei, SASAHARA, Tetsuya, KOBAYASHI, Masanori, UNNO, Ken
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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Beschreibung
Zusammenfassung:	[Problem] To provide a pressure sensor and a sensor system which are able to easily detect the state of power supplied to a detection circuit. [Solution] A pressure sensor 10 comprises: a membrane 22 in which deformation in response to pressure occurs; a plurality of sensor resistors R1-R4 which are formed on the membrane 22 and constitute a detection circuit 30; and a detection resistor Rs which is formed on the membrane 22 and is for detecting the state of power supplied to the detection circuit 30, wherein one end of the detection resistor Rs is electrically connected to the detection circuit 30, and the other end of the detection resistor Rs is electrically connected to a fifth electrode 45 which is formed on the membrane 22.