PHOTON DETECTION
Provided is a photon detector and method of manufacturing a photon detector. The method comprises forming an oxide layer (14), forming a superconducting material layer (24a, 24b, 24c), and forming an oxidation barrier layer (16) between, and abutting, the oxide layer and the superconducting material...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | Provided is a photon detector and method of manufacturing a photon detector. The method comprises forming an oxide layer (14), forming a superconducting material layer (24a, 24b, 24c), and forming an oxidation barrier layer (16) between, and abutting, the oxide layer and the superconducting material layer. |
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