OPTICAL PROCESSING DEVICE
This optical processing device comprises a combining element that combines a first optical path of a first light beam of a first wavelength and a second optical path of a second light beam of a second wavelength which is longer than the first wavelength, a condensing optical system that has a positi...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng ; fre ; ger |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | This optical processing device comprises a combining element that combines a first optical path of a first light beam of a first wavelength and a second optical path of a second light beam of a second wavelength which is longer than the first wavelength, a condensing optical system that has a positive refractive force and condenses each of the first light beam and the second light beam from the combining element toward a workpiece, and a correction optical system having a negative refractive force, wherein the correction optical system is arranged in the first optical path on the incident side of the combining element, one of the first and second light beams is for processing the workpiece and the other of the first and second light beams is for measuring the workpiece. |
---|