HYBRID GLASS PLASTIC FLOW CELL AND FABRICATION METHODS

HYBRID GLASS PLASTIC FLOW CELL AND FABRICATION METHODS

Provided herein include various examples of a method for manufacturing aspects of flow cell. The method may include performing chemical processes on a surface of the patterned wafer to prepare the surface of the patterned, singulating the wafer into individual dies, orienting each die on a temporary...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CRIVELLI, Paul, KRIENDL, Gerald, SHARMA, Amit, ADAY, Jon, ZIEBARTH, Jonathan
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
PHYSICS
TESTING
TRANSPORTING
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Beschreibung
Zusammenfassung:Provided herein include various examples of a method for manufacturing aspects of flow cell. The method may include performing chemical processes on a surface of the patterned wafer to prepare the surface of the patterned, singulating the wafer into individual dies, orienting each die on a temporary substrate, where the orienting creates spaces between each individual die, and molding a material over the spaces to create a hybrid wafer comprised of glass and molded material. The method may also include bonding two of the hybrid wafers together, forming a bonded wafer stack.