METHOD FOR MANUFACTURING A RADIATION WINDOW WITH AN EDGE STRENGTHENING STRUCTURE AND A RADIATION WINDOW WITH AN EDGE STRENGTHENING STRUCTURE
The invention relates to a method for manufacturing a radiation window (100) for an X-ray measurement apparatus. The method comprises: producing an etch stop layer (102) on a surface of a carrier (101); producing a foil structure (103) on an opposite side of the etch stop layer (102) than the carrie...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | The invention relates to a method for manufacturing a radiation window (100) for an X-ray measurement apparatus. The method comprises: producing an etch stop layer (102) on a surface of a carrier (101); producing a foil structure (103) on an opposite side of the etch stop layer (102) than the carrier (101); and attaching a combined structure comprising at least the etch stop layer (102) and the foil structure (103) to a region (202) around an opening (104) in a housing (105) of the X-ray measurement apparatus with the foil structure (103) facing the housing (105) so that an edge strengthening structure (106) is arranged between the combined structure and at least an edge region (201) around the opening (104) in the housing (105) or at least partly inside the foil structure (103). The method further comprises: detaching at least part of the carrier (101) before attaching the combined structure, or detaching at least part of the carrier (101) after attaching the combined structure, wherein the combined structure further comprises the carrier (101). The invention relates also to a radiation window for an X-ray measurement apparatus. |
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