PURGE DEVICE

The purge device includes a base to which a positioning pin configured to support a container to be purged is attached, and a nozzle configured to be connected to a gas inlet of the container supported by the positioning pin. The purge device includes a nozzle unit having a main body portion attache...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: ITO, Yasuhisa
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The purge device includes a base to which a positioning pin configured to support a container to be purged is attached, and a nozzle configured to be connected to a gas inlet of the container supported by the positioning pin. The purge device includes a nozzle unit having a main body portion attached to the base via the positioning pin, and a gas introduction portion coupled to the main body portion and provided with the nozzle.