SYSTEM AND METHODS FOR AUTOMATED PROCESSING OF MULTIPLE SAMPLES IN A BIB SYSTEM

Systems and methods for efficiently processing multiple samples with a BIB system, are disclosed. An example method for efficiently processing multiple samples with a BIB system according to the present invention comprises removing an individual sample holder containing a sample from a storage locat...

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Bibliographische Detailangaben
Hauptverfasser: HROUZEK, Michal, NEELISETTY, Krishna Kanth, WANDROL, Petr, NOVAK, Libor
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Systems and methods for efficiently processing multiple samples with a BIB system, are disclosed. An example method for efficiently processing multiple samples with a BIB system according to the present invention comprises removing an individual sample holder containing a sample from a storage location within the BIB system, wherein the BIB system includes multiple sample holders positioned in one or more storage locations, loading the individual sample holder onto a sample stage configured to hold the sample holder during polishing of the corresponding sample held by the individual sample holder, and causing a BIB source to emit a broad ion beam towards the sample, wherein the broad ion beam removes at least a portion of the sample upon which it is incident. Once a desired portion of the sample is removed, the sample holder is removed from the sample stage and loaded back into the storage location.