METHOD AND SYSTEM FOR DETECTING AND DIAGNOSING FLUID LINE LEAKAGE FOR INDUSTRIAL SYSTEMS

METHOD AND SYSTEM FOR DETECTING AND DIAGNOSING FLUID LINE LEAKAGE FOR INDUSTRIAL SYSTEMS

A method of detecting a leak-induced abnormal condition in a semiconductor processing system comprising a subsystem. The method includes determining a performance characteristic of the semiconductor processing system. The method includes determining the leak-induced abnormal condition is present wit...

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Bibliographische Detailangaben
Hauptverfasser: JOHNSTON, Robert E, SELVY, Andrew D, GANDER, Daniel, HOGARD, Chelsea, PIZZELLA, Miranda
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
MEASURING
PHYSICS
TESTING
TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES
TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:A method of detecting a leak-induced abnormal condition in a semiconductor processing system comprising a subsystem. The method includes determining a performance characteristic of the semiconductor processing system. The method includes determining the leak-induced abnormal condition is present within the subsystem, wherein the determination of the presence of the leak-induced abnormal condition is based on the performance characteristic and a temperature characteristic of the subsystem. The method also includes performing a corrective action based on the determination of the presence of the leak-induced abnormal condition.