BROAD ION BEAM (BIB) SYSTEMS FOR MORE EFFICIENT PROCESSING OF MULTIPLE SAMPLES

Systems and methods for operating a broad ion beam (BIB) polisher in a sample preparation workflow having improved uptime are disclosed. The broad ion beam (BIB) sample preparation system comprises a housing (128) defining an interior volume (130); a sample stage (114) positioned within the interior...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HROUZEK, Michal, NEELISETTY, Krishna Kanth, WANDROL, Petr, NOVAK, Libor
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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