BROAD ION BEAM (BIB) SYSTEMS FOR MORE EFFICIENT PROCESSING OF MULTIPLE SAMPLES

Systems and methods for operating a broad ion beam (BIB) polisher in a sample preparation workflow having improved uptime are disclosed. The broad ion beam (BIB) sample preparation system comprises a housing (128) defining an interior volume (130); a sample stage (114) positioned within the interior...

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Bibliographische Detailangaben
Hauptverfasser:	HROUZEK, Michal, NEELISETTY, Krishna Kanth, WANDROL, Petr, NOVAK, Libor
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	Systems and methods for operating a broad ion beam (BIB) polisher in a sample preparation workflow having improved uptime are disclosed. The broad ion beam (BIB) sample preparation system comprises a housing (128) defining an interior volume (130); a sample stage (114) positioned within the interior volume (130), wherein the sample stage is configured to hold a sample holder during polishing of a sample (104) held by the sample holder; a first BIB source (106) configured to emit a first broad ion beam (108) towards the sample (104) when in use, wherein the first BIB source (106) is positioned within a first source housing (138); and a second BIB source (148) configured to emit a second broad ion beam towards the sample (104) when in use, wherein the second BIB source (148) is positioned within a second source housing (142), wherein the second BIB source (148) is configured to be removed while the first BIB source (106) is emitting the first broad ion beam (108) towards the sample.