SELF-ALIGNED NANO-PILLAR COATINGS AND METHOD OF MANUFACTURING

Meta-surface devices may be advantageously used for miniaturization, planar and thin film, high spatial resolution, and dense integration into optical devices. They have the potential to be used for steering a beam propagation direction, shaping wave-front light, and imparting information for applic...

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Bibliographische Detailangaben
Hauptverfasser: LATAWIEC, Pawel, FOROUZMAND, Seyedali
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Meta-surface devices may be advantageously used for miniaturization, planar and thin film, high spatial resolution, and dense integration into optical devices. They have the potential to be used for steering a beam propagation direction, shaping wave-front light, and imparting information for application such as sensing, imaging, light detection, and ranging. However, meta-surface devices may have poor overall efficiency when compared with traditional optical devices. Embodiments of this disclosure relate to meta-surface devices including a pattern of high-index pillars with a low-index coating. Advantageously, the low-index coating may improve optical efficiency of the meta-surface devices which may make these meta-surface devices suitable for a variety of applications.