MEMS DEVICE

A MEMS device comprises a first deflectable membrane structure, a rigid electrode structure and a second deflectable membrane structure in a vertically spaced configuration, wherein the rigid electrode structure is arranged between the first and second deflectable membrane structures, wherein the fi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WALTHER, Arnaud, HERRMANN, Matthias Friedrich, TIMME, Hans-Joerg, BARZEN, Stefan, ONARAN, Abidin Gueclue, KIRIAK, Maria, FUELDNER, Marc, GEISSLER, Stefan, TKACHUK, Konstantin
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS PUBLIC ADDRESS SYSTEMS
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