MEMS DEVICE

A MEMS device comprises a first deflectable membrane structure, a rigid electrode structure and a second deflectable membrane structure in a vertically spaced configuration, wherein the rigid electrode structure is arranged between the first and second deflectable membrane structures, wherein the first and second deflectable membrane structures each comprise a deflectable portion, and wherein the deflectable portions of the first and second deflectable membrane structures are mechanically coupled by means of mechanical connection elements to each other and are mechanically decoupled from the rigid electrode structure; and wherein at least a subset of the mechanical connection elements are elongated mechanical connection elements, wherein the elongated mechanical connection elements have a lateral cross-sectional area with a laterally elongated dimension along a direction which is within a tolerance range of +/- 20° perpendicular to the local membrane deflection gradient of the first and second deflectable membrane structures at the lateral position of the respective elongated mechanical connection element.