OPTICAL SCANNING DEVICE

An optical scanning device 10 includes a standing plate part 13b which has an inclined groove 30 and a through hole 31 at positions above a VCSEL 17 and a MEMS optical deflector 20, and which is fixed to a substrate 15. A plate-shaped mirror 23 and a rotary mirror 25 have one end portions thereof in...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	NAKAZAWA Katsunori, YAMAMOTO Atsushi, TAKAO Yoshifumi, IDRIS Nazirul Afham, SAKURAI Makoto, MATSUMARU Naoya
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	An optical scanning device 10 includes a standing plate part 13b which has an inclined groove 30 and a through hole 31 at positions above a VCSEL 17 and a MEMS optical deflector 20, and which is fixed to a substrate 15. A plate-shaped mirror 23 and a rotary mirror 25 have one end portions thereof in the Y-axis direction supported by the inclined groove 30 and the through hole 31, respectively. The through hole has the shape of a rotating body having an axis in the Y-axis direction as the centerline thereof.