EMISSION OPTICAL SYSTEM, EMISSION DEVICE, AND OPTICAL MEASUREMENT DEVICE

EMISSION OPTICAL SYSTEM, EMISSION DEVICE, AND OPTICAL MEASUREMENT DEVICE

An irradiation optical system configured to irradiate an object with first light includes: a light source including a surface emitting element emitting the first light from a light emitting surface and a lens part enhancing directivity of the first light emitted from the surface emitting element; a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ONODA, Hirohisa, MORISHITA, Naokazu, MATSUMURA, Tomokazu, KONDO, Fusanori
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:An irradiation optical system configured to irradiate an object with first light includes: a light source including a surface emitting element emitting the first light from a light emitting surface and a lens part enhancing directivity of the first light emitted from the surface emitting element; a light shaping member on which the first light emitted from the light source is incident via a light incidence surface and which shapes the incident first light using a light passing hole and emits the shaped first light; and a first lens configured to form an image of the first light emitted from the light shaping member on the object. A distance between the light emitting surface of the surface emitting element and the light incidence surface of the light shaping member is equal to or less than 26 times a size in one direction of the light emitting surface.