TEMPERATURE ADJUSTMENT UNIT
A temperature control unit includes: a substantially flat-plate-shaped placement section (10) configured to support a heat transfer target; a heating section (20) configured to heat a heat transfer target placed on the placement section (10); and a heat transfer section (30) disposed in contact with...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A temperature control unit includes: a substantially flat-plate-shaped placement section (10) configured to support a heat transfer target; a heating section (20) configured to heat a heat transfer target placed on the placement section (10); and a heat transfer section (30) disposed in contact with at least one of the placement section (10) and the heating section (20), the heat transfer section (30) being at least partially formed of a metal porous structure. |
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