SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

A chamber with a platen having a heat transfer element embedded therein, a plurality of carrier holders positioned about the platen, a plurality of support members extending from the plurality of carrier holders, and a carrier positioned on the support members of one of the plurality of carrier hold...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: COLLINS, Richard O, GILJUM, Richard, ISHII, Masato, BERGER, Alexander
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A chamber with a platen having a heat transfer element embedded therein, a plurality of carrier holders positioned about the platen, a plurality of support members extending from the plurality of carrier holders, and a carrier positioned on the support members of one of the plurality of carrier holders.