SILICON-CONTAINING OXIDE-COATED ALUMINUM NITRIDE PARTICLES
Provided are a method of manufacturing a silicon-containing oxide-coated aluminum nitride particle, the method being capable of manufacturing a silicon-containing oxide-coated aluminum nitride particle having improved moisture resistance in which a high thermal conductivity inherent to an aluminum n...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | Provided are a method of manufacturing a silicon-containing oxide-coated aluminum nitride particle, the method being capable of manufacturing a silicon-containing oxide-coated aluminum nitride particle having improved moisture resistance in which a high thermal conductivity inherent to an aluminum nitride particle is maintained; a method of manufacturing a heat dispersing resin composition containing the silicon-containing oxide-coated aluminum nitride particle; and the silicon-containing oxide-coated aluminum nitride particle. A method of manufacturing a silicon-containing oxide-coated aluminum nitride particle including an aluminum nitride particle and a silicon-containing oxide coating covering the surface of the aluminum nitride particle, the method comprising: a first step of covering the surface of the aluminum nitride particle with an organic silicone compound including a specific structure; and a second step of heating the aluminum nitride particle covered with the organic silicone compound at a temperature of 300°C or more and less than 1000°C, wherein the content of carbon atoms in the silicon-containing oxide-coated aluminum nitride particle is less than 1000 ppm by mass. |
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