ELECTROSTATIC CLAMP

An electrostatic clamp for holding an object by electrostatic force is disclosed. The electrostatic clamp comprises a dielectric member (445) having a plurality of conductive burls (410;415) extending from a surface to define a plane in which the object is held, and a conductive element extending be...

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Bibliographische Detailangaben
Hauptverfasser:	NGUYEN, Cung, Vuong, VAN EDEN, Gustaaf, Galein, MAKARENKO, Ksenia, Sergeevna
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	An electrostatic clamp for holding an object by electrostatic force is disclosed. The electrostatic clamp comprises a dielectric member (445) having a plurality of conductive burls (410;415) extending from a surface to define a plane in which the object is held, and a conductive element extending between and connecting the plurality of burls. The conductive element is disposed within one or more trenches (440) formed on the surface of the dielectric member. Also disclosed is a method of manufacturing the electrostatic clamp.