CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD FOR CHARGED PARTICLE BEAM APPARATUS

A charged particle beam apparatus (100) for scanning a specimen (S) with a charged particle beam and acquiring a scan image, the charged particle beam apparatus (100) including: an optical system (2) that includes a pulse mechanism (20) for illuminating the specimen (S) with pulses of the charged particle beam, and a deflector (40) that deflects the charged particle beam and scans the specimen (S) with the deflected charged particle beam; and a control unit (80) that controls the optical system (2), the control unit (80) controlling the optical system (2) so as to satisfy T = n × t (n is a natural number), where T represents a dwell time of the charged particle beam in each pixel of the scan image, and t represents a cycle of pulses of the charged particle beam.