A METHOD OF PERFORMING METROLOGY ON A MICROFABRICATION PATTERN

There is provided a method of performing metrology on a microfabrication pattern, the method comprising:generating, by a SEM, a first set of frames of a first region of the pattern, a second set of frames of a second region of the pattern, and a third set of frames of a third region of the pattern,...

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Bibliographische Detailangaben
Hauptverfasser:	Lorusso, Gian Francesco, Severi, Joren, De Simone, Danilo
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING
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Beschreibung
Zusammenfassung:	There is provided a method of performing metrology on a microfabrication pattern, the method comprising:generating, by a SEM, a first set of frames of a first region of the pattern, a second set of frames of a second region of the pattern, and a third set of frames of a third region of the pattern, wherein a number of frames of the first, second and third sets of frames are different;for each of the first, second and third set of frames, by a computing device:estimating feature data representing edge positions, linewidths or centerline positions of one or more features of the region of the pattern of the set of frames, andcomputing a preliminary estimate of a roughness parameter from the feature data, wherein the roughness parameter is indicative of a line edge roughness, a linewidth roughness, or a pattern placement roughness of the one or more features;wherein the method further comprises, by the computing device:fitting a model equation to the preliminary estimates of the roughness parameter and a model parameter dependent on the number of frames of the set of frames, the model equation relating the model parameter to the roughness parameter; andcomputing a final estimate of the roughness parameter as an asymptotic value of the fitted model equation.