SHAPE MEASUREMENT SYSTEM

Provided is a shape measuring system that can acquire accurate three-dimensional information even for an object to be measured having large irregularities on a measurement surface.A shape measuring system according to the present disclosure includes a single light source part, two light receiving pa...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ASHITANI Tatsuji, MIYATANI Yoshitaka, OKAMOTO Ryuta
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:Provided is a shape measuring system that can acquire accurate three-dimensional information even for an object to be measured having large irregularities on a measurement surface.A shape measuring system according to the present disclosure includes a single light source part, two light receiving parts whose positions are shifted from each other, and a signal processing part. The light source part includes a light source, a waveform control lens, and a scan mechanism that sweeps measurement light that has passed through the waveform control lens in a specific direction of a measurement target. The light receiving parts each include a light receiving lens on which reflected light reflected by the measurement target among measurement light from the light source part is incident, an EVS, which is an asynchronous imaging device that is a light receiving element, an event issuing part that detects an event on the basis of output data from the EVS and outputs event data, and a transmitting part that outputs the event data to the signal processing part. The signal processing part includes an unwanted signal removing part that removes an unwanted signal resulting from incidence of secondary reflected light, and a three-dimensional calculating part that calculates a three-dimensional shape of the measurement target.