ANTENNA SUBSTRATE
A clamping jig according to the present disclosure includes a support portion, a grip portion located at one end of the support portion and configured to grip an outer peripheral portion of a substrate, and a base portion located at the other end of the support portion and configured to support the...
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| Format: | Patent |
| Sprache: | eng ; fre ; ger |
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| Zusammenfassung: | A clamping jig according to the present disclosure includes a support portion, a grip portion located at one end of the support portion and configured to grip an outer peripheral portion of a substrate, and a base portion located at the other end of the support portion and configured to support the support portion. At least the base portion contains a ceramic containing silicon carbide as a main component. In the base portion, the amount of carbon present in an upper main surface is less than the amount of carbon present in a portion other than the upper main surface. |
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