ANTENNA SUBSTRATE

A clamping jig according to the present disclosure includes a support portion, a grip portion located at one end of the support portion and configured to grip an outer peripheral portion of a substrate, and a base portion located at the other end of the support portion and configured to support the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: SAKURAI, Keizou
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A clamping jig according to the present disclosure includes a support portion, a grip portion located at one end of the support portion and configured to grip an outer peripheral portion of a substrate, and a base portion located at the other end of the support portion and configured to support the support portion. At least the base portion contains a ceramic containing silicon carbide as a main component. In the base portion, the amount of carbon present in an upper main surface is less than the amount of carbon present in a portion other than the upper main surface.