OPTICAL PROCESSING DEVICE
An optical processing apparatus includes: a split optical system (14) configured to split a first light beam (L1), which enters thereto, into a second light beam (L2) including a plurality of light beams; a magnification varying optical system (11, 19) that is disposed on at least one of an optical...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | An optical processing apparatus includes: a split optical system (14) configured to split a first light beam (L1), which enters thereto, into a second light beam (L2) including a plurality of light beams; a magnification varying optical system (11, 19) that is disposed on at least one of an optical path of the first light beam entering the split optical system and an optical path of the plurality of light beams included in the second light beam emitted from the split optical system; and a condensing optical system (27) configured to condenses the second light beam, wherein an object is processed by the second light beam from the condensing optical system. |
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