MICROMECHANICAL RESONATOR ASSEMBLY WITH EXTERNAL ACTUATOR
A micromechanical resonator assembly which includes an internal actuator. The internal actuator further includes an oscillation body configured to oscillate about one or more axes, the oscillation body having one or more eigen frequencies. The micromechanical resonator assembly further includes an e...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A micromechanical resonator assembly which includes an internal actuator. The internal actuator further includes an oscillation body configured to oscillate about one or more axes, the oscillation body having one or more eigen frequencies. The micromechanical resonator assembly further includes an external actuator that includes an oscillating part. The micromechanical resonator assembly further includes a mounting base that includes electronic driving part. The external actuator being mounted on the mounting base and being electrically connected to the electronic driving part, for allowing excitation of the oscillation body of the internal actuator by transfer of energy from the oscillating part to the oscillating body. The micromechanical resonator assembly provides external actuation of the oscillation body of the internal actuator by use of the external actuator and hence, provides extremely large scan angles of 180°. |
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