METHOD AND STRUCTURE TO INCORPORATE MULTIPLE LOW LOSS PHOTONIC CIRCUIT COMPONENTS

A photonic integrated circuit including a substrate, a plurality of oxide layers on the substrate, and various passive and active integrated optical components in the plurality of oxide layers. The integrated optical components include silicon nitride waveguides, a Pockets effect phase shifter (e.g....

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Bibliographische Detailangaben
Hauptverfasser: VERT, Alexey, LICAUSI, Nicholas V, MCMAHON, James Jay, JOHANSSON, Henrik, MELNICHUK, Ann, KAMINENI, Vimal
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A photonic integrated circuit including a substrate, a plurality of oxide layers on the substrate, and various passive and active integrated optical components in the plurality of oxide layers. The integrated optical components include silicon nitride waveguides, a Pockets effect phase shifter (e.g., BaTiO3 phase shifter), a superconductive nanowire single photon detector (SNSPD), an optical isolation structure surrounding the SNSPD, a single photon generator, a thermal isolation structure, a heater, a temperature sensor, a photodiode for data communication (e.g., a Ge photodiode), or a combination thereof.