NOZZLE PLATE COMPRISING BOROSILICATE GLASS

A nozzle plate defines at least one nozzle connected to the nozzle plate at a base, wherein the at least one nozzle has a height and a top having an inner width and an outer width, wherein a ratio of the height to the inner width is greater than 5, and wherein the nozzle plate comprises a borosilica...

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Bibliographische Detailangaben
Hauptverfasser:	MOORE, John R, WANG, Shih-Wa
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CORRECTION OF TYPOGRAPHICAL ERRORS i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME LINING MACHINES PERFORMING OPERATIONS PRINTING SELECTIVE PRINTING MECHANISMS STAMPS TRANSPORTING TYPEWRITERS
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Beschreibung
Zusammenfassung:	A nozzle plate defines at least one nozzle connected to the nozzle plate at a base, wherein the at least one nozzle has a height and a top having an inner width and an outer width, wherein a ratio of the height to the inner width is greater than 5, and wherein the nozzle plate comprises a borosilicate glass. The nozzle plate is formed via a method including providing a silicon wafer having a surface; providing a borosilicate glass wafer having a surface; etching the surface of the silicon wafer to form a plurality of trenches in the surface; anodically bonding the etched surface of the silicon wafer to the surface of the borosilicate glass wafer to form a two layer composite; heating the two layer composite at a temperature of at least about 750° C.; and releasing the silicon wafer from the borosilicate glass to form the nozzle plate.