IMPEDANCE TUNERS WITH LINEAR ACTUATORS

The accuracy of an impedance tuner may be improved and the size may be reduced by using linear actuators instead of rotary motors. The linear actuator may be integrated with position sensors to allow very small size, and implemented with a servo system for best accuracy and speed. Spring loaded arms...

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Bibliographische Detailangaben
Hauptverfasser:	SIMPSON, Gary, R, BREARLEY, David
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS RESONATORS RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE SELECTING RESONANT CIRCUITS TESTING TUNING RESONANT CIRCUITS WAVEGUIDES
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Beschreibung
Zusammenfassung:	The accuracy of an impedance tuner may be improved and the size may be reduced by using linear actuators instead of rotary motors. The linear actuator may be integrated with position sensors to allow very small size, and implemented with a servo system for best accuracy and speed. Spring loaded arms holding the mismatch probes allow the tuner to operate in any orientation to further fit into small spaces. The small size reduces losses by allowing direct connection to wafer probes for on-wafer measurement systems.