PRESSURE SENSOR AND METHOD FOR MANUFACTURING A PRESSURE SENSOR

The present disclosure relates to a method for manufacturing a pressure sensor having a main body and a pressure-sensitive ceramic measurement membrane, wherein an outer edge of the measurement membrane is connected in a pressure-tight manner by an encircling joint to a surface of the main body faci...

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Bibliographische Detailangaben
Hauptverfasser: SCHMIDT, Elke, ROSSBERG, Andreas, THAM, Anh Tuan, PONATH, Nils
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:The present disclosure relates to a method for manufacturing a pressure sensor having a main body and a pressure-sensitive ceramic measurement membrane, wherein an outer edge of the measurement membrane is connected in a pressure-tight manner by an encircling joint to a surface of the main body facing the outer edge of the measurement membrane, wherein the joint includes a ternary active hard solder in eutectic composition: providing the main body, the measurement membrane and the active hard solder; positioning the active hard solder between the outer edge of the measurement membrane and the surface of the main body; heating the main body, the measurement membrane and the active hard solder to a joining temperature which essentially corresponds to a temperature of the eutectic point of the active hard solder.