ADDITIVE CHEMICAL VAPOR DEPOSITION METHODS AND SYSTEMS
A system for additive chemical vapor deposition (CVD) and (CVD) methods for producing free-standing 3D metal deposits with a controlled crystal size, the method comprising a) supplying a CVD mixture containing at least one CVD precursor into a deposition chamber having a rotatable mandrel with a dep...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A system for additive chemical vapor deposition (CVD) and (CVD) methods for producing free-standing 3D metal deposits with a controlled crystal size, the method comprising a) supplying a CVD mixture containing at least one CVD precursor into a deposition chamber having a rotatable mandrel with a deposition surface or a deposition table with a deposition surface; b) generating a radiation pattern in at least two programmable radiation modules, each programmable radiation module containing an array of individually addressable radiation transmitting and/or radiation emitting elements; and c) irradiating the deposition surface with a first radiation pattern from a first radiation module and a second radiation pattern from a second radiation module, wherein the first radiation module irradiates the deposition surface in a first direction and the second radiation module irradiates the deposition surface in a second direction, and depositing a material from the CVD mixture on the deposition surface. |
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