GUIDE DEVICE, COOLANT DUCT AND DIFFUSION VACUUM PUMP

A guide device for a diffusion vacuum pump having a plurality of annular guide plates. The guide plates being arranged radially, wherein at least one guide plate has a first section starting from a connection point and a second section starting from the connection point. Therein, the first section e...

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Bibliographische Detailangaben
Hauptverfasser: WERKER, Sascha Georg, SCHWEIZER, Hans-Werner, GRAF, Tobias
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A guide device for a diffusion vacuum pump having a plurality of annular guide plates. The guide plates being arranged radially, wherein at least one guide plate has a first section starting from a connection point and a second section starting from the connection point. Therein, the first section extends axially in a first direction, the second section extending axially in the opposite second direction. Therein the first section is designed to taper radially and/or the second section is designed to taper radially.