SYSTEMS, PRODUCTS, AND METHODS FOR IMAGE-BASED PATTERN SELECTION

A method for selecting patterns for training a model to predict patterns to be printed on a substrate. The method includes (a) obtaining images of multiple patterns, wherein the multiple patterns correspond to target patterns to be printed on a substrate; (b) grouping the images into a group of spec...

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Hauptverfasser: LIU, Meng, CHEN, Hao, JIA, Qi, HU, Weixuan, WUU, Jen-Yi, SUN, Rencheng
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Sprache:eng ; fre ; ger
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creator LIU, Meng
CHEN, Hao
JIA, Qi
HU, Weixuan
WUU, Jen-Yi
SUN, Rencheng
description A method for selecting patterns for training a model to predict patterns to be printed on a substrate. The method includes (a) obtaining images of multiple patterns, wherein the multiple patterns correspond to target patterns to be printed on a substrate; (b) grouping the images into a group of special patterns and multiple groups of main patterns; and (c) outputting a set of patterns based on the images as training data for training the model, wherein the set of patterns includes the group of special patterns and a representative main pattern from each group of main patterns.
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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
CALCULATING
CINEMATOGRAPHY
COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
title SYSTEMS, PRODUCTS, AND METHODS FOR IMAGE-BASED PATTERN SELECTION
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