SYSTEMS, PRODUCTS, AND METHODS FOR IMAGE-BASED PATTERN SELECTION

A method for selecting patterns for training a model to predict patterns to be printed on a substrate. The method includes (a) obtaining images of multiple patterns, wherein the multiple patterns correspond to target patterns to be printed on a substrate; (b) grouping the images into a group of spec...

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Bibliographische Detailangaben
Hauptverfasser: LIU, Meng, CHEN, Hao, JIA, Qi, HU, Weixuan, WUU, Jen-Yi, SUN, Rencheng
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A method for selecting patterns for training a model to predict patterns to be printed on a substrate. The method includes (a) obtaining images of multiple patterns, wherein the multiple patterns correspond to target patterns to be printed on a substrate; (b) grouping the images into a group of special patterns and multiple groups of main patterns; and (c) outputting a set of patterns based on the images as training data for training the model, wherein the set of patterns includes the group of special patterns and a representative main pattern from each group of main patterns.