SUBSTRATE SUPPORT TRAY FOR DEPOSITING MATERIAL ON EDGES OF A SUBSTRATE FACE

SUBSTRATE SUPPORT TRAY FOR DEPOSITING MATERIAL ON EDGES OF A SUBSTRATE FACE

A plate configured to support at least one substrate during a deposition of material on the substrate, including at least:a solid holding surface on which a main face of the substrate is intended to be placed during the deposition, the dimensions of which are smaller than those of the main face of t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JAY, Frédéric, THIRIOT, Benjamin, FAVRE, Wilfried
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A plate configured to support at least one substrate during a deposition of material on the substrate, including at least:a solid holding surface on which a main face of the substrate is intended to be placed during the deposition, the dimensions of which are smaller than those of the main face of the substrate so that edges of the main face of the substrate are not in contact with the solid holding surface;connecting elements forming arms mechanically connecting the solid holding surface to a frame of the plate.