DETECTOR INSPECTION DEVICE, DETECTOR ASSEMBLY, DETECTOR ARRAY, APPARATUS, AND METHOD

The present invention provides a detector inspection device for interrogating at least part of a detector comprised in a charged particle-optical assessment apparatus, the detector inspection device comprising: a coupler configured to be positioned proximate to a detector element of a detector; and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	MARISSEN, Roelof, Albert, STEENSTRA, Herre, Tjerk, RODRIGUES MANSANO, Andre, Luis, SEEKLES, Duije, WIELAND, Marco, Jan-Jaco, VISSER, Erwin, Robert, Alexander, VAN T VEEN, Gretchen, Renée, VAN LEEUWEN, Richard, Michel, LOOIJE, Alexius, Otto
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY PICTORIAL COMMUNICATION, e.g. TELEVISION
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Beschreibung
Zusammenfassung:	The present invention provides a detector inspection device for interrogating at least part of a detector comprised in a charged particle-optical assessment apparatus, the detector inspection device comprising: a coupler configured to be positioned proximate to a detector element of a detector; and a device controller configured to apply a stimulating signal to the coupler to stimulate a response signal in the detector for interrogating at least part of the detector.