LINEAR TRANSPORT SYSTEM AND METHOD FOR CONTROLLING LINEAR TRANSPORT SYSTEM

A linear transport system includes a stator having a track and coils provided along the track, movable elements with a magnet and movable along the track, scales provided on the movable elements, sensors provided along the track at respective intervals and configured to detect the movable elements to obtain scale positions of the scales, and a parameter recording unit configured to memorize first cumulative values each corresponding to a corresponding sensor. Each of the first cumulative values is obtained by accumulating, from a reference position to the corresponding sensor, error correction values based on which errors between the respective intervals and measured values of the respective intervals are corrected. A position calculation unit is configured to calculate a position of a detected carrier based on detection data of a detecting sensor that has detected the detected carrier and based on the first cumulative value corresponding to the detecting sensor.