DEWAR FLASK, PHOTOLUMINESCENCE MEASUREMENT DEVICE, CONCENTRATION MEASUREMENT METHOD, AND SILICON MANUFACTURING METHOD
A significant reduction in the burden on an evacuation operator and a significant reduction in evacuation cost are achieved when the concentration of impurities included in silicon are measured in liquid helium by a photoluminescence method. A glass which serves as a material for forming an inner cy...
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Zusammenfassung: | A significant reduction in the burden on an evacuation operator and a significant reduction in evacuation cost are achieved when the concentration of impurities included in silicon are measured in liquid helium by a photoluminescence method. A glass which serves as a material for forming an inner cylinder Dewar flask (2) has an SiOz content of 65% by weight to 75% by weight, and has an average thermal expansion rate of 25 × 10-7/°C to 55 × 10-7/°C when the temperature of the glass is 20°C to 300°C. (Fig. 2) |
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