VACUUM PUMP WITH A HOLWECK PUMP STAGE WITH VARIABLE HOLWECK GEOMETRY
To change a characteristic value of a Holweck pump stage with a comparatively small step or by finely adjusting the same in a vacuum pump which includes at least one Holweck pump stage having a suction port and an exhaust port and in which the Holweck pump stage has a Holweck rotor including a rotor...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | To change a characteristic value of a Holweck pump stage with a comparatively small step or by finely adjusting the same in a vacuum pump which includes at least one Holweck pump stage having a suction port and an exhaust port and in which the Holweck pump stage has a Holweck rotor including a rotor sleeve, and a Holweck stator having a stator sleeve, the stator sleeve is disposed coaxially to the Holweck rotor with a Holweck clearance, and the stator sleeve has a Holweck screw portion having a plurality of screw grooves.SOLUTION: A stator sleeve 10 is constituted into one-piece, and at least one screw portion parameter of a Holweck screw portion 16 in a group of screw portion parameters composed of the number of webs 12, a screw pitch, a width of a screw groove 14, a width of the web, and a height of the web on a groove bottom 18 is changed over an axial extension length of the stator sleeve.SELECTED DRAWING: Figure 7 |
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