SURFACE TREATMENT APPARATUS

A compact and efficient surface treatment apparatus is provided. Surface treatment apparatuses P1 to Pn are lined-up, and a workpiece 4 is taken in and out by an electric actuator 18. The workpiece 4 that has been treated in a surface treatment chamber is transferred to the next surface treatment ch...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NISHIMOTO, Kazuyoshi, OKUDA, Tomoji, NISHINAKA, Yutaka, TANIGAWA, Masahito, UTSUMI, Masayuki
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A compact and efficient surface treatment apparatus is provided. Surface treatment apparatuses P1 to Pn are lined-up, and a workpiece 4 is taken in and out by an electric actuator 18. The workpiece 4 that has been treated in a surface treatment chamber is transferred to the next surface treatment chamber by moving the entire electric actuator 18. In this way, the workpiece 4 is treated in a plurality of surface treatment chambers.