DEPOSITION APPARATUS FOR ORGANIC LIGHT-EMITTING DIODE

The present disclosure relates to a deposition apparatus for an organic light emitting diode, and in particular, to a deposition apparatus for an organic light emitting diode shortening a time of evaluation on a deposition material by independently mainting the deposition material through an auxilia...

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Bibliographische Detailangaben
Hauptverfasser:	SHIN, Heeyoung, KIM, Jae Il, LEE, Jun Young, JEONG, Kwang Jin
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BOILING BOILING APPARATUS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	The present disclosure relates to a deposition apparatus for an organic light emitting diode, and in particular, to a deposition apparatus for an organic light emitting diode shortening a time of evaluation on a deposition material by independently mainting the deposition material through an auxiliary chamber.