HIGH DIMENSIONAL FLEXIBLE STAMP WITH TILED STRENGTHENED AREA

A flexible stamp includes at least one strengthening layer and texturing layer with a relief area. At least part of the at least one strengthening layer is positioned below the at least one texturing layer and at least partially supports the relief area and texturing layer. The combination of this p...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	TITULAER, Bram Johannes, SHAHROKHVAND, Maryam, TER MEULEN, Jan Matthijs
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A flexible stamp includes at least one strengthening layer and texturing layer with a relief area. At least part of the at least one strengthening layer is positioned below the at least one texturing layer and at least partially supports the relief area and texturing layer. The combination of this part of strengthening layer, texturing layer and relief area forms an active area. The flexible stamp includes a non-active area having at least one further part of the at least one strengthening layer which does not support the texturing layer and relief area or at least one further strengthening layer. Each strengthening layer has a thermal expansion coefficient of 10 ppm/°C or lower, a Young's modulus of 10 GPa-200 GPa, and thickness below 300 µm. The active area and the non-active area of the flexible stamp represent at least 90% of the total area of the flexible stamp.