MULTILAYER BODY, RELEASE AGENT COMPOSITION, AND METHOD FOR PRODUCING PROCESSED SEMICONDUCTOR SUBSTRATE

The invention provides a laminate having a semiconductor substrate, a support substrate, and an adhesive layer and a release layer disposed between the semiconductor substrate and the support substrate, wherein the release layer is a film formed from a releasing agent composition containing an organ...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YANAI, Masaki, OKUNO, Takahisa, OGATA, Hiroto, SHINJO, Tetsuya
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:The invention provides a laminate having a semiconductor substrate, a support substrate, and an adhesive layer and a release layer disposed between the semiconductor substrate and the support substrate, wherein the release layer is a film formed from a releasing agent composition containing an organic resin, a branched-chain polysilane, and a solvent.