VACUUM PUMP AND CLEANING SYSTEM FOR VACUUM PUMP

A vacuum pump is provided that can decompose by-products into particles using radicals and effectively discharge the particles to outside. The vacuum pump includes: an outer cylinder having an inlet port and an outlet port; a rotor shaft rotationally supported inside the outer cylinder; a rotating b...

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Bibliographische Detailangaben
1. Verfasser:	ICHIHARA, Koichi
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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Beschreibung
Zusammenfassung:	A vacuum pump is provided that can decompose by-products into particles using radicals and effectively discharge the particles to outside. The vacuum pump includes: an outer cylinder having an inlet port and an outlet port; a rotor shaft rotationally supported inside the outer cylinder; a rotating body including a plurality of rotor blades fixed to the rotor shaft and is rotatable together with the rotor shaft, the vacuum pump further including at least one radical supply port capable of supplying a plurality of types of radicals into the outer cylinder; and a radical supply means for supplying radicals to the radical supply port.